SE/BSE是電子束掃瞄方式不同
Signals Detected :
– Backscattered electrons (BSE)
– Secondary electrons (SE)
Resolution (Depth) :
– 10-100 nm (BSE)
– 1-10 nm (SE)
SE需要高真空度, BSE低真空即可
Types of Image Information :
– Topography (SE,BSE)
– Composition (BSE)
– Crystal orientation (BSE)
– Electrical field (SE)
– Magnetic field (SE, BSE)
– Beam-induced current (SC)
你可參考以下網頁
http://www.me.tnu.edu.tw/~me010/95NSC-SEM/index.htm
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